Pre-production analysis in the thin-film optical coatings technology

Valid and reliable method of thickness control is a key instrument for the successful manufacture of thin film optical coatings. Determining the best control strategy may be carried out using the pre-production analysis. In this work possibilities of this approach are demonstrated on the example of structures of narrow-band and short-blocking filter for IR spectral range. Procedure development for the determination of the most appropriate control strategy will allow to obtain reproducible results in processes vacuum deposition of multilayer optical coatings.