Effect of oxide film on silicon spray coefficients
Автор: Rabbimov E.A., Juraeva N.M., Akhmadjonova U.T.
Журнал: Экономика и социум @ekonomika-socium
Рубрика: Основной раздел
Статья в выпуске: 6-2 (73), 2020 года.
Бесплатный доступ
The main goal of this work was to study the effect of embedded Ba atoms on the sputtering coefficient of the silicon surface and to study the effect of ion bombardment on the destruction of a thin oxide film formed on the Si surface.
Vacuum, auger electron spectroscopy, high temperature heating, monte carlo model
Короткий адрес: https://sciup.org/140252612
IDR: 140252612
Статья научная
