The study of a shearing interferometer in the phase measuring devices and systems of decoding holographic interferograms

Автор: Maiorov Evgeniy Evgenevich, Dagaev A.V., Ponоmarev S.E., Chernyak T.A.

Журнал: Научное приборостроение @nauchnoe-priborostroenie

Рубрика: Физика приборостроения

Статья в выпуске: 2 т.27, 2017 года.

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In the present article the methods of holographic interferometry, which are highly informative and high-precision tool for obtaining data are presented. The relevance and urgency of application of the shearing interferometer for measurement of the disturbed object are revealed. The analysis of the effect of cross-interference on the measurement accuracy, namely: mismatch, not exceeding 2 µm, the measurement error in the mode of determining the relative magnitude of the displacement vector does not exceed 0.015 rad, accounting for 0.002 shares of interference fringes, and with the additional offset of ~10 µm, the maximum error does not exceed 0.001 of a share of the interference fringes are performed. Equalization interference for the shearing interferometer, where it is seen that for the case of rotation of the plate relative to the axis Х2 the graph of the phase difference and the derivative of the angle αу is essentially nonlinear, which leads to the deformation of interference field and the error of the read information are received. The first investigated the limits of applicability of the interferometer and the upper limit of the measuring range of the magnitude of the displacement vector is equal to 1.5 mm and the lower limit determined by displacement of 0.01 µm.

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Holographic interferometry, shearing interferometer, holographic interferogram, phase measurement systems, perturbed object

Короткий адрес: https://sciup.org/14265070

IDR: 14265070   |   DOI: 10.18358/np-27-2-i3240

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